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Ships within 48 hours · Estimated delivery Aug 7 - Aug 12
Flange: QF100
Part No: AS01500-63
Model No: MCU 120
Part No: 9900-0005-02
TEL Tokyo Electron WCPL/TRS Chill Plate Transition Stage Station Lithius Working Flange: QF100TEL Tokyo Electron WCPL TRS Chill Plate Transition Stage Station Lithius Working Part No: WCPL TRS Water Controlled Chill Plate Process Station Transition Stage Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Parts List (approximation, parts may vary or not be included or installed) Assembly Part No: 5087 402532 13, BASE ASSY,FRONT 5010 101316 11 FRAME(CPL 1) 1 5010 306509 11 BRACKET 1 5010 306510 11 BRACKET 1 5010 405033 11
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