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This Autonics TZ4ST Loadlock Chamber Heater Temperature Controller is used working surplus
Soleniod Valve Model No: MYH-5/3G-2
Electrical Diagram No: 4S066-011-2
ARM NP8148E007-0 1
Pearl Kogyo CF-500-400K(CE) RF Power Supply Hitachi M-712E No Handle Working This Autonics TZ4ST Loadlock ChamberPearl Kogyo CF 500 400K(CE) RF Power Supply Hitachi M 712E No Handle Working Inventory # K 7483 Part No: CF 500 400K(CE) Model No: CF 500 400K Input: 3, 200VAC, 3. 5kVA Output: 500W @ 400kHz CE Marked Removed from a Hitachi M 712E Shallow Trench Etcher System Made in Japan This Pearl Kogyo CF 500 400K(CE) RF Power Supply is used working surplus. The unit was powered on in our test facility but could not be fully tested as we currently do not have all
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