Tylan FC-2979MEP5-M MFC Mass Flow Controller 500 SCCM CO TEL Unity II Used Model No: CONTROLLER CCM PDS232

Model No: CONTROLLER CCM PDS232

Removed from a Hitachi M-712E Shallow Trench Etcher System Included Components

Part# 0190-08932-002

Part No: ERCR-ND11-A000 Installed Components

Tylan FC-2979MEP5-M MFC Mass Flow Controller 500 SCCM CO TEL Unity II Used Model No: CONTROLLER CCM PDS232Tylan FC 2979MEP5 M MFC Mass Flow Controller 500 SCCM CO TEL Unity II Used Part No: FC 2979MEP5 M Model No: 2979 Series Range Gas: 500 SCCM, CO Interface: 9 Pin D Connector: Surface Mount CE Marked May Require Calibration Removed from a TEL Tokyo Electron U2 855DD Unity II 200mm Plasma Etcher System This Tylan FC 2979MEP5 M MFC Mass Flow Controller is used working surplus. The physical condition is good, but there are signs of previous use and