TEL Tokyo Electron ICPL Interface Block Chill Plate Process Station Lithius Used This Unbranded/Generic Does Not Apply

This Unbranded/Generic Does Not Apply is used working surplus

Part No: 0020-64580

5010-308447-11 ARM(RIGHT) 1

I/F TMB2000(BOARD

TEL Tokyo Electron ICPL Interface Block Chill Plate Process Station Lithius Used This Unbranded/Generic Does Not ApplyTEL Tokyo Electron ICPL Interface Block Chill Plate Process Station Lithius Used Part No: ICPL Model No: Interface Block Chill Plate Process Station ICP R Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Parts List (approximation, parts may vary or not be included or installed) Assembly Part No: 5085 408538 14 BASE(ICP R)ASSY 5010 101202 11: FRAME(ICPL R) (Qty. 1) 5010 306891 11: PAN(R),DRAIN (Qty. 1) 5010 306892 11: