Daihen NX-MGA-5A1 RF Power Generator 400kHz TEL Tokyo Electron Trias Working Made in Japan This Nikon

Made in Japan This Nikon 4S013-364 BLPWX4 Board PCB is used working surplus

Part No: 0100-02411

Part No: 4S007-789

B1 4700 Titan is used working surplus

Daihen NX-MGA-5A1 RF Power Generator 400kHz TEL Tokyo Electron Trias Working Made in Japan This NikonDaihen NX MGA 5A1 RF Power Generator 400kHz TEL Tokyo Electron Trias Working Part No: NX MGA 5A1 Input: 3, 200VAC, 50 60Hz Output: 400kHz @ 500W Removed from a TEL Tokyo Electron Trias CF,CN, ,CO Radical Process Reactor System This item is working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 36"x24"x14"