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200MM POLY
Item Condition: Refurbished
Inventory # 13301
The unit has a seized screw that was cut flush with the flange face (see photos)
TEL Tokyo Electron 5087-404467-12 Scope 5086-404224-11 4 Magnets Lithius Working 200MM POLYTEL Tokyo Electron 5087 404467 12 Scope 5086 404224 11 with 4 Magnets Lithius Inventory # A 16224 Part No: 5087 404467 12 Model No: SCOPE ASSY Removed from a TEL Tokyo Electron Clean Track Lithius System Parts List (approximation, some parts may vary) Assembly Part No: 5087 404467 12 SCOPE ASSY 5004 300016 11 BATH,RRC (509510024911 1 5010 311958 11 COVER,BATH 1 5010 409215 11 PLATE 2 5010 311833 11 BLOCK 2 5010 409130 11 SUPPORT 2 5010 310850 11 COVER
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